Ultra-low dislocation density (<1 × 10⁶ cm⁻²) enabling high-power and high-frequency device performance.
Free-standing (FS) crystal structure with minimal wafer bow (<10 µm) and excellent surface flatness (Ra < 0.2 nm).
Carbon-doped (C-doped) n-type conductivity control for precise carrier concentration tuning (1–5 × 10¹⁸ cm⁻³).
Chemical-mechanical polished (CMP) double-side finished surface compatible with advanced epitaxial growth processes.
High thermal conductivity (>130 W/m·K) and exceptional chemical inertness in harsh processing environments.
High-electron-mobility transistors (HEMTs) for 5G RF power amplifiers and base station infrastructure.
Laser diodes (LDs) and micro-LED arrays for next-generation displays and AR/VR systems.
Power electronics modules in electric vehicles (EVs), onboard chargers, and industrial inverters.
UV-C optoelectronic devices including germicidal LEDs and photodetectors.
Space-qualified radiation-hardened semiconductor components for satellite communication systems.
| Chemical Type | Gallium Nitride (GaN), carbon-doped |
| Product Form | Free-standing circular wafer |
| Standard Diameter | 100 mm (4-inch) |
| Thickness | 400 ± 25 µm |
| Crystal Orientation | c-plane (0001), on-axis |
| Surface Finish | Double-side polished, Si-face CMP finished, N-face etched |
| Primary Applications | Epitaxial template for GaN-on-GaN homoepitaxy |
| Regulatory Compliance | RoHS 3 compliant; REACH SVHC-free; no conflict minerals used |
| Common Compatible Systems | Suitability |
| MOCVD Reactors (e.g., AIXTRON G3, Veeco K465i) | Highly Recommended – Optimized for uniform GaN buffer and active layer growth |
| MBE Systems (e.g., Riber Compact 21, SVT Associates MBE-480) | Recommended – Requires minor chamber conditioning for stable N-flux calibration |
| Atomic Layer Epitaxy (ALE) Platforms | Suitable – Compatible with NH₃-based precursors and low-temperature nucleation protocols |
| Plasma-Enhanced CVD (PECVD) for passivation layers | Suitable – Stable under RF plasma exposure up to 300 °C substrate temperature |
Q1: What is the CAS Registry Number for GaN-FS-C-U-C100?
A: Gallium nitride has CAS No. 25617-97-4; this specific free-standing, carbon-doped substrate variant does not carry a unique CAS number as it is a crystalline solid material defined by structural and doping specifications rather than molecular composition.
Q2: Is GaN-FS-C-U-C100 intended for direct use in end-product devices or solely as an epitaxial platform?
A: It is exclusively designed as a high-quality epitaxial substrate — not a consumable chemical reagent. It serves as the foundational wafer for subsequent thin-film deposition (e.g., AlGaN/GaN HEMT stacks) and is never dissolved, dosed, or incorporated as a bulk additive.
Q3: How does GaN-FS-C-U-C100 differ from sapphire- or SiC-based GaN templates?
A: Unlike heteroepitaxial templates, GaN-FS-C-U-C100 enables true homoepitaxy — eliminating lattice mismatch and thermal expansion coefficient differences. This yields superior crystal quality, higher breakdown voltage, and improved thermal management versus sapphire (Al₂O₃) or silicon carbide (SiC) alternatives.
Q4: Are there any known leaching or elemental migration concerns during high-temperature epitaxy?
A: No measurable gallium or nitrogen migration occurs below 1100 °C in standard MOCVD/MBE environments. Carbon dopant remains substitutional and thermally stable; independent ICP-MS analysis of post-growth reactor residues confirms no detectable Ga or C contamination beyond instrument detection limits (≤0.1 ppb).
Q5: Does this substrate meet ISO 14644-1 Class 5 cleanroom handling requirements for semiconductor fabrication?
A: Yes — wafers are packaged in certified ISO Class 5 (Class 100) FOUPs, undergo final megasonic cleaning per SEMI F57 standards, and are verified via particle counting (≤10 particles ≥0.3 µm per cm²) prior to shipment.
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