Guangzhou Eric Wei Chemical Co., Ltd.
Guangzhou Eric Wei Chemical Co., Ltd.

GaN-FS-C-U-C100 Gallium Nitride Substrate

GaN-FS-C-U-C100 is a high-purity, free-standing gallium nitride substrate from the GaN-FS series by Nanowin—engineered for UV optoelectronics and high-power RF devices. Featuring ultra-low dislocation density (<1×10⁶ cm⁻²), C-face orientation, and 100 mm diameter, it ensures superior crystal quality and thermal stability over traditional sapphire or SiC substrates.
  • gan fs c u c100 gallium nitride substrate_efdcfbc0
  • gan fs c u c100 gallium nitride substrate_efdcfbc0

Features Of GaN-FS-C-U-C100 Gallium Nitride Substrate

  1. Ultra-low dislocation density (<1 × 10⁶ cm⁻²) enabling high-power and high-frequency device performance.

  2. Free-standing (FS) crystal structure with minimal wafer bow (<10 µm) and excellent surface flatness (Ra < 0.2 nm).

  3. Carbon-doped (C-doped) n-type conductivity control for precise carrier concentration tuning (1–5 × 10¹⁸ cm⁻³).

  4. Chemical-mechanical polished (CMP) double-side finished surface compatible with advanced epitaxial growth processes.

  5. High thermal conductivity (>130 W/m·K) and exceptional chemical inertness in harsh processing environments.

Typical Applications Of GaN-FS-C-U-C100 Gallium Nitride Substrate

  1. High-electron-mobility transistors (HEMTs) for 5G RF power amplifiers and base station infrastructure.

  2. Laser diodes (LDs) and micro-LED arrays for next-generation displays and AR/VR systems.

  3. Power electronics modules in electric vehicles (EVs), onboard chargers, and industrial inverters.

  4. UV-C optoelectronic devices including germicidal LEDs and photodetectors.

  5. Space-qualified radiation-hardened semiconductor components for satellite communication systems.

Specifications Of GaN-FS-C-U-C100 Gallium Nitride Substrate



Chemical TypeGallium Nitride (GaN), carbon-doped
Product FormFree-standing circular wafer
Standard Diameter100 mm (4-inch)
Thickness400 ± 25 µm
Crystal Orientationc-plane (0001), on-axis
Surface FinishDouble-side polished, Si-face CMP finished, N-face etched
Primary ApplicationsEpitaxial template for GaN-on-GaN homoepitaxy
Regulatory ComplianceRoHS 3 compliant; REACH SVHC-free; no conflict minerals used


Compatible Systems Of GaN-FS-C-U-C100 Gallium Nitride Substrate

Common Compatible SystemsSuitability
MOCVD Reactors (e.g., AIXTRON G3, Veeco K465i)Highly Recommended – Optimized for uniform GaN buffer and active layer growth
MBE Systems (e.g., Riber Compact 21, SVT Associates MBE-480)Recommended – Requires minor chamber conditioning for stable N-flux calibration
Atomic Layer Epitaxy (ALE) PlatformsSuitable – Compatible with NH₃-based precursors and low-temperature nucleation protocols
Plasma-Enhanced CVD (PECVD) for passivation layersSuitable – Stable under RF plasma exposure up to 300 °C substrate temperature

GaN-FS-C-U-C100 Gallium Nitride Substrate – Frequently Asked Questions (FAQ)

Q1: What is the CAS Registry Number for GaN-FS-C-U-C100?

A: Gallium nitride has CAS No. 25617-97-4; this specific free-standing, carbon-doped substrate variant does not carry a unique CAS number as it is a crystalline solid material defined by structural and doping specifications rather than molecular composition.


Q2: Is GaN-FS-C-U-C100 intended for direct use in end-product devices or solely as an epitaxial platform?

A: It is exclusively designed as a high-quality epitaxial substrate — not a consumable chemical reagent. It serves as the foundational wafer for subsequent thin-film deposition (e.g., AlGaN/GaN HEMT stacks) and is never dissolved, dosed, or incorporated as a bulk additive.


Q3: How does GaN-FS-C-U-C100 differ from sapphire- or SiC-based GaN templates?

A: Unlike heteroepitaxial templates, GaN-FS-C-U-C100 enables true homoepitaxy — eliminating lattice mismatch and thermal expansion coefficient differences. This yields superior crystal quality, higher breakdown voltage, and improved thermal management versus sapphire (Al₂O₃) or silicon carbide (SiC) alternatives.


Q4: Are there any known leaching or elemental migration concerns during high-temperature epitaxy?

A: No measurable gallium or nitrogen migration occurs below 1100 °C in standard MOCVD/MBE environments. Carbon dopant remains substitutional and thermally stable; independent ICP-MS analysis of post-growth reactor residues confirms no detectable Ga or C contamination beyond instrument detection limits (≤0.1 ppb).


Q5: Does this substrate meet ISO 14644-1 Class 5 cleanroom handling requirements for semiconductor fabrication?

A: Yes — wafers are packaged in certified ISO Class 5 (Class 100) FOUPs, undergo final megasonic cleaning per SEMI F57 standards, and are verified via particle counting (≤10 particles ≥0.3 µm per cm²) prior to shipment.



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