Semiconductor Temperature Control Fluid Perfluoropolyether CL180

Features Of Semiconductor Temperature Control Fluid Perfluoropolyether CL180

1. Exceptionally low volatility and negligible vapor pressure at operating temperatures (−60 °C to +200 °C), ensuring stable thermal management without evaporative loss.

2. Chemically inert toward silicon, quartz, aluminum, stainless steel, and common elastomers—minimizing contamination risk in ultra-clean semiconductor processing environments.

3. Non-flammable, non-toxic, and ozone-safe with zero halogen content—fully compliant with industrial safety and environmental stewardship requirements.

4. Outstanding thermal stability with no measurable decomposition below 300 °C, enabling long service life in recirculating chiller systems.

5. Ultra-low particulate generation and non-volatile residue (<0.001% volatiles at 150 °C), meeting SEMI F57 purity standards for critical thermal control applications.

Typical Applications Of Semiconductor Temperature Control Fluid Perfluoropolyether CL180

1. Temperature stabilization of photolithography steppers and scanners during high-precision exposure cycles.

2. Cooling fluid for plasma etch and CVD chamber temperature control units requiring chemical compatibility and particle-free operation.

3. Thermal interface medium in advanced packaging test handlers and wafer-level burn-in systems.

4. Heat transfer fluid in high-reliability immersion cooling loops for semiconductor metrology equipment (e.g., OCD, CD-SEM).

5. Dielectric coolant for high-power RF test fixtures and probe station thermal plates where electrical isolation is essential.

Specifications Of Semiconductor Temperature Control Fluid Perfluoropolyether CL180

Compatible Systems Of Semiconductor Temperature Control Fluid Perfluoropolyether CL180

Semiconductor Temperature Control Fluid Perfluoropolyether CL180 – Frequently Asked Questions (FAQ)

Q1: What is the CAS Registry Number for CL180?

A: The CAS Registry Number for Semiconductor Temperature Control Fluid Perfluoropolyether CL180 is 60168-88-9 (generic PFPE K-type structure; exact molecular weight distribution is proprietary).

Q2: How much CL180 is typically required to fill a standard 5 kW semiconductor process chiller?

A: Typical fill volume ranges from 8 to 14 liters depending on loop length, reservoir size, and heat exchanger geometry; always perform a system flush with isopropyl alcohol prior to initial fill to remove hydrocarbon residues.

Q3: How does CL180 compare to Galden® HT 170 or Fomblin® Y LVAC 18/6 in terms of thermal stability and metal compatibility?

A: CL180 exhibits comparable thermal stability (>300 °C) but superior resistance to aluminum corrosion under humidified conditions and lower extractables vs. Galden® HT 170; unlike Fomblin® Y LVAC 18/6, CL180 contains no end-group instability risks (no –COF termination), reducing potential fluoride ion migration.

Q4: Does CL180 meet EU SCIP database reporting requirements under the Waste Framework Directive?

A: Yes—CL180 contains no substances listed on the EU Candidate List of SVHCs; full SCIP-ready dossier (including UFI code and composition details) is available upon request via certified supplier portal.

Q5: Has CL180 been evaluated for extractables/migration into photoresist layers during thermal plate contact?

A: Yes—per SEMI F21-0312 testing, CL180 demonstrates <0.1 ppb total organic extractables (TOE) after 72 h at 120 °C on chrome-coated silicon wafers; no detectable impact on resist adhesion or post-exposure bake profiles.