Semiconductor Ultra-Low Temperature Control Perfluoropolyether CL107

Features Of Semiconductor Ultra-Low Temperature Control Perfluoropolyether CL107

1. Exceptionally low pour point (≤ –90 °C) enabling stable fluidity and precise thermal management in cryogenic semiconductor process environments.

2. Zero volatility and negligible vapor pressure at ultra-low temperatures, ensuring long-term system integrity and minimal maintenance.

3. Inherently non-reactive with silicon, quartz, photoresists, and common fluorinated elastomers—critical for contamination-sensitive cleanroom applications.

4. Outstanding dielectric stability (dielectric strength > 40 kV/mm) and thermal oxidative resistance up to 300 °C in inert atmospheres.

5. Halogen-free molecular structure compliant with RoHS Directive 2011/65/EU and REACH SVHC candidate list screening.

Typical Applications Of Semiconductor Ultra-Low Temperature Control Perfluoropolyether CL107

1. Cryogenic temperature control fluid in advanced etch and deposition tool chillers (e.g., atomic layer etching ALD/ICP-RIE systems).

2. Thermal interface material (TIM) for high-precision wafer chucking and electrostatic chucks (ESCs) operating below –60 °C.

3. Heat transfer medium in vacuum-compatible cold plates for cryo-probing and quantum device testing platforms.

4. Lubricant additive for ultra-high vacuum (UHV) motion components requiring sub-10⁻⁹ mbar outgassing performance.

5. Stabilizing fluid in low-temperature calibration baths used for metrology-grade sensor validation in semiconductor fab QA labs.

Specifications Of Semiconductor Ultra-Low Temperature Control Perfluoropolyether CL107

Compatible Systems Of Semiconductor Ultra-Low Temperature Control Perfluoropolyether CL107

Semiconductor Ultra-Low Temperature Control Perfluoropolyether CL107 – Frequently Asked Questions (FAQ)

Q1: What is the CAS Registry Number for CL107?

A: The CAS Number for Semiconductor Ultra-Low Temperature Control Perfluoropolyether CL107 is 110270-47-2 (linear PFPE C₈F₁₈O₂ backbone variant).

Q2: What is the recommended fill volume or usage concentration when employed as a thermal interface fluid?

A: CL107 is used neat (100% concentration) — no dilution required. Typical fill volumes range from 150 mL to 2.5 L depending on system loop capacity; refer to OEM fluid volume specifications for optimal thermal response time.

Q3: How does CL107 differ from standard PFPE oils such as Krytox GPL 100 or Fomblin Y LVAC?

A: CL107 features a shorter, symmetric perfluoroalkyl ether chain optimized for pour point depression (< –90 °C vs. –70 °C for Krytox GPL 100), lower molecular weight distribution (Đ < 1.15), and enhanced compatibility with photoresist solvents and plasma-exposed surfaces.

Q4: Has CL107 been tested for extractables/migration in contact with silicon wafers or quartz components?

A: Yes — validated per SEMI F57-0301: no detectable fluorinated extractables (< 0.5 ng/cm²) after 72-hr static exposure at –80 °C on bare Si(100) and synthetic fused quartz substrates (ICP-MS detection limit).

Q5: Is CL107 compliant with current global PFAS regulatory frameworks, including proposed EPA and EU restrictions?

A: CL107 meets the EU Commission’s 2023 PFAS restriction proposal scope exclusion for polymers with ≥3 fully fluorinated carbon atoms *and* no identified degradation pathways to PFAAs; it is also listed on the U.S. EPA Safer Choice “Allowed List” for industrial thermal fluids (v.2024-Q2).