Guangzhou Eric Wei Chemical Co., Ltd.
Guangzhou Eric Wei Chemical Co., Ltd.

Semiconductor Temperature Control Fluid CL7500

CL7500 is a high-purity semiconductor temperature control fluid from the ChemLogix CL Series. Engineered for precision thermal management in advanced chip fabrication, it offers exceptional thermal stability, low volatility, and non-corrosive compatibility with copper, silicon, and stainless steel. Its ultra-low particle count and controlled ionic impurities meet SEMI F57 standards, ensuring reliability in immersion cooling and wafer processing equipment.
  • semiconductor temperature control fluid cl7500_39b9a778
  • semiconductor temperature control fluid cl7500_39b9a778

Features Of Semiconductor Temperature Control Fluid CL7500

  1. Ultra-low volatility and negligible vapor pressure at operating temperatures (−40 °C to +180 °C), minimizing fluid loss and system contamination.

  2. Exceptional thermal stability with no measurable degradation after 1,000 hours at 150 °C under inert atmosphere.

  3. Non-corrosive to copper, aluminum, stainless steel, and common elastomers (EPDM, FKM, silicone) used in semiconductor thermal management systems.

  4. Halogen-free formulation compliant with IPC-J-STD-020 and JEDEC moisture sensitivity level (MSL) requirements for cleanroom environments.

  5. Low surface tension (21.5 mN/m at 25 °C) enabling uniform wetting and efficient heat transfer across microchannel cold plates.

Typical Applications Of Semiconductor Temperature Control Fluid CL7500

  1. Temperature stabilization of high-power laser diodes and VCSEL arrays in photonic integrated circuit (PIC) test platforms.

  2. Coolant for wafer probers and automated test equipment (ATE) thermal chucks requiring precise ±0.1 °C control.

  3. Heat transfer medium in immersion cooling systems for advanced packaging substrates (e.g., 2.5D/3D ICs, chiplets).

  4. Thermal interface fluid in liquid cold plate assemblies for power amplifiers and RF transceivers in 5G mmWave base stations.

  5. Process fluid in temperature-controlled bonding and reflow simulation chambers for die attach and underfill curing validation.

Specifications Of Semiconductor Temperature Control Fluid CL7500



Chemical TypeSynthetic hydrocarbon-based polyalphaolefin (PAO) blend
Product FormClear, colorless liquid
AppearanceTransparent, water-white, odorless
Melting Point−48 °C (ASTM D97)
Boiling Point (at 760 mmHg)≥320 °C (ASTM D1120, TGA onset)
Primary ApplicationsNon-contact thermal control in semiconductor manufacturing, testing, and packaging equipment
Key FeaturesHalogen-free, non-oxidizing, low outgassing (≤1.0 % TML per ASTM E595)
Regulatory ComplianceREACH SVHC-free; RoHS 3 (2015/863/EU) compliant; ISO 14001 & ISO 45001 aligned manufacturing


Compatible Systems Of Semiconductor Temperature Control Fluid CL7500

Common Compatible SystemsSuitability
Chillers with titanium or 316 stainless steel circuits (e.g., Huber Ministat, LAUDA Proline)Highly Recommended – No material compatibility issues; validated for continuous operation up to 180 °C
Microchannel cold plates (copper/nickel-plated, silicon carbide substrates)Highly Recommended – Demonstrated long-term wettability and no interfacial delamination
Wafer-level thermal chucks (e.g., Temptronic, Thermonics)Recommended – Requires pre-flush with isopropyl alcohol; compatible with vacuum-sealed chuck interfaces
Immersion cooling tanks for substrate burn-in systemsSuitable – Non-reactive with FR-4, BT resin, and molded epoxy packages; avoid prolonged contact with uncoated polycarbonate viewports

Semiconductor Temperature Control Fluid CL7500 – Frequently Asked Questions (FAQ)

Q1: What is the CAS Registry Number for CL7500?

A: CL7500 is a proprietary multi-component formulation; individual components are disclosed under NDA, and the mixture does not carry a single CAS number. Full compositional disclosure is available under signed CDA for qualified engineering evaluation.


Q2: Is CL7500 suitable for direct immersion of bare silicon wafers or open-die assemblies?

A: Yes — CL7500 has been tested per SEMI F21-0302 for particle generation and metal ion leaching (<5 ppt Cu, Ni, Fe); however, post-immersion rinse with ultra-pure water is recommended before metrology or bonding steps.


Q3: How does CL7500 compare to standard silicone oils (e.g., Dow Corning 200 Fluid) in semiconductor applications?

A: Unlike silicone oils, CL7500 contains zero volatile cyclic siloxanes (D4–D6), eliminates silicone residue risk on optics/sensors, and offers superior oxidative stability above 120 °C without antioxidant depletion.


Q4: Does CL7500 meet NASA ASTM E595 low-outgassing requirements for space-grade electronics testing?

A: Yes — CL7500 achieves ≤0.8 % TML (Total Mass Loss) and ≤0.05 % CVCM (Collected Volatile Condensable Materials) at 125 °C/24h per ASTM E595, qualifying it for Class A low-outgassing applications.


Q5: Can CL7500 migrate into or extract plasticizers from PVC tubing commonly used in lab coolant loops?

A: No — CL7500 shows no measurable swelling, extraction, or plasticizer migration from medical-grade PVC (USP Class VI) or Santoprene® tubing after 1,000-hour soak at 85 °C, as confirmed by FTIR and gravimetric analysis.



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