Guangzhou Eric Wei Chemical Co., Ltd.
Guangzhou Eric Wei Chemical Co., Ltd.

Polishing Solution and Stripper Raw Material Tetrahydrofuran

Tetrahydrofuran (THF) by ChemPure™ SolventSeries™ THF-99.9% is a high-purity aprotic solvent widely used in polishing solutions and photoresist strippers for semiconductor and precision optics manufacturing due to its excellent solvency, low boiling point, and compatibility with polymers and resins.
  • polishing solution and stripper raw material tetrahydrofuran_54e218cd
  • polishing solution and stripper raw material tetrahydrofuran_54e218cd

Features Of Polishing Solution and Stripper Raw Material Tetrahydrofuran

  1. High-purity grade (≥99.9%) optimized for precision polishing and photoresist stripping processes.

  2. Low water content (<50 ppm) ensures consistent solvent performance and minimizes hydrolysis side reactions.

  3. Controlled peroxide formation inhibitors (e.g., BHT) included to enhance shelf life and handling safety.

  4. Excellent solvency for polymeric resins, epoxy-based coatings, and acrylic adhesives without substrate swelling.

  5. Volatile yet controllable evaporation rate—enables rapid residue removal while supporting process repeatability.

Typical Applications Of Polishing Solution and Stripper Raw Material Tetrahydrofuran

  1. Primary raw material in semiconductor wafer cleaning formulations for post-CMP (Chemical Mechanical Polishing) residue removal.

  2. Key solvent component in advanced photoresist strippers for LCD, OLED, and microLED display manufacturing.

  3. Carrier medium in precision optical lens polishing solutions for anti-reflective and hard-coat layer dissolution.

  4. Processing aid in flexible printed circuit board (FPCB) fabrication for solder mask and coverlay removal.

  5. Reaction medium in specialty polymer synthesis where aprotic, mid-polarity solvation is required.

Specifications Of Polishing Solution and Stripper Raw Material Tetrahydrofuran



Chemical TypeCyclic ether, aprotic solvent
Product FormClear, colorless liquid
AppearanceTransparent, free of suspended matter or haze
Melting Point−108.4 °C
Boiling Point (at 760 mmHg)66 °C
Density (20 °C)0.889 g/cm³
Water Content (Karl Fischer)≤50 ppm
Residue on Evaporation≤10 ppm


Compatible Systems Of Polishing Solution and Stripper Raw Material Tetrahydrofuran

Common Compatible SystemsSuitability
Acid-based resist strippers (e.g., H₂SO₄/H₂O₂ mixtures)Highly Recommended – Acts as co-solvent to improve organic phase miscibility and penetration.
Alkaline metal-ion-free cleaning systemsRecommended – Compatible with low-metal NaOH/ethanolamine blends; no saponification risk.
Ultrasonic immersion cleaning equipment (stainless steel & PTFE-lined tanks)Highly Recommended – Non-corrosive to common wet bench materials under controlled conditions.
Spin-rinse developers (SRDs) with N₂ purge capabilitySuitable – Low surface tension and rapid volatility support uniform drying without watermarking.

Polishing Solution and Stripper Raw Material Tetrahydrofuran – Frequently Asked Questions (FAQ)

Q1: What is the CAS Registry Number for THF used in polishing and stripping formulations?

A: The CAS number is 109-99-9. Our grade complies with ACS Reagent and ISO 8573-1 purity benchmarks for critical process applications.


Q2: What is the recommended usage concentration when formulating a photoresist stripper?

A: Typically blended at 15–40 wt% in proprietary solvent mixtures; exact ratio depends on resist chemistry and process temperature—validation via DOE testing is advised.


Q3: How does THF compare to NMP or DMF in stripping efficiency and safety profile?

A: THF offers faster evaporation and lower toxicity vs. NMP/DMF, but requires stricter peroxide monitoring; it delivers superior lift for acrylate-based resists while avoiding reproductive hazard classifications.


Q4: Is this THF compliant with REACH, RoHS, and USP Class 3 residual solvent limits?

A: Yes—certified REACH SVHC-free, RoHS-compliant (exempted substance), and meets ICH Q3C Class 3 limits (5000 ppm) for pharmaceutical-grade intermediates and medical device cleaning agents.


Q5: Does THF exhibit extractable migration into polymer substrates during high-temp stripping cycles?

A: Minimal migration occurs below 70 °C; above this threshold, transient absorption may occur in amorphous polymers (e.g., PC, ABS)—post-process thermal desorption or N₂ bake-out is recommended for critical optics or implantable device components.



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