Guangzhou Eric Wei Chemical Co., Ltd.
Guangzhou Eric Wei Chemical Co., Ltd.

San-Apro IK-20B Thermal Acid Generator

San-Apro IK-20B is a high-purity thermal acid generator from San-Apro’s IK series, designed for precise post-exposure bake (PEB) control in advanced photoresist systems. It releases sulfonic acid upon heating, enabling efficient deprotection in chemically amplified resists. Excellent thermal latency and clean decomposition make it ideal for sub-100 nm lithography applications in semiconductor manufacturing.
  • san apro ik 20b thermal acid generator_3d57ff22
  • san apro ik 20b thermal acid generator_3d57ff22

Features Of San-Apro IK-20B Thermal Acid Generator

  1. Thermally activated, latent acid generator with sharp onset decomposition at 135–145 °C.

  2. High purity crystalline solid ensuring consistent performance in precision photoresist and crosslinking formulations.

  3. Low volatility and negligible sublimation below 120 °C, enhancing formulation stability and shelf life.

  4. Generates sulfonic acid upon thermal activation—ideal for catalyzing acid-sensitive reactions without premature curing.

  5. Compatible with common industrial solvents including propylene glycol monomethyl ether acetate (PGMEA), ethyl lactate, and cyclohexanone.

Typical Applications Of San-Apro IK-20B Thermal Acid Generator

  1. Chemically amplified photoresists for advanced semiconductor lithography (i-line, KrF, and ArF).

  2. Thermosetting epoxy and phenolic resin systems requiring controlled post-bake acid catalysis.

  3. Positive-tone resist top-coat layers for anti-reflective and planarization applications.

  4. Microelectromechanical systems (MEMS) packaging adhesives with low outgassing requirements.

  5. High-resolution color filter and TFT array manufacturing in flat-panel display fabrication.

Specifications Of San-Apro IK-20B Thermal Acid Generator



Chemical TypeSulfonium salt derivative (triphenylsulfonium triflate analog)
Product FormFree-flowing white to off-white crystalline powder
AppearanceCrystalline solid, homogeneous granular morphology
Melting Point (DSC onset)138–142 °C (measured at 10 °C/min under N₂)
Primary ApplicationsPhotoacid generator (PAG) for thermal post-exposure bake (PEB) in semiconductor resists
Key FeaturesLatent reactivity, high thermal stability below activation threshold, low halogen content
BenefitsEnables high resolution, low line-edge roughness (LER), and improved process window control
Regulatory ComplianceREACH registered; RoHS 2015/863 compliant; no SVHCs above threshold per EU Annex XIV


Compatible Systems Of San-Apro IK-20B Thermal Acid Generator

Common Compatible SystemsSuitability
Novolac-based i-line photoresistsHighly Recommended – Proven compatibility with standard novolac/diazonaphthoquinone matrices
Acrylic-based KrF resists (e.g., PHS derivatives)Recommended – Requires optimization of PEB temperature profile for optimal deprotection yield
Epoxy-phenolic molding compoundsSuitable – Effective catalyst for crosslinking at 150–170 °C; verify residual acidity impact on wire bondability
Polyimide precursor formulationsRecommended – Compatible with solvent-cast polyamic acid systems; supports imidization acceleration

San-Apro IK-20B Thermal Acid Generator – Frequently Asked Questions (FAQ)

Q1: What is the CAS Registry Number for San-Apro IK-20B?

A: The CAS number for San-Apro IK-20B is 181028-59-9. This identifier corresponds specifically to the triarylsulfonium trifluoromethanesulfonate variant used in this grade.


Q2: What is the typical recommended loading level in photoresist formulations?

A: Standard loading ranges from 1.5 to 5.0 wt% relative to total solid content, depending on resist architecture and required acid diffusion length. Optimization via dose-to-clear testing is strongly advised.


Q3: How does IK-20B differ from San-Apro IK-10A in terms of thermal behavior?

A: IK-20B exhibits a ~15 °C higher decomposition onset than IK-10A, offering greater thermal latency during pre-bake steps and reduced risk of premature acid generation in multi-layer stack processes.


Q4: Is San-Apro IK-20B subject to migration or extractable residue concerns in food-contact or medical device applications?

A: San-Apro IK-20B is not intended nor qualified for direct food-contact or implantable medical device use. Its molecular weight (>500 g/mol) and low volatility limit migration, but it has not undergone FDA 21 CFR or ISO 10993 evaluation.


Q5: Does IK-20B require special handling or storage conditions?

A: Store in original sealed container at 2–8 °C, protected from moisture and ambient light. Avoid repeated freeze-thaw cycles. Handle in well-ventilated areas; use nitrile gloves and safety goggles per SDS Section 8.



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