Guangzhou Eric Wei Chemical Co., Ltd.
Guangzhou Eric Wei Chemical Co., Ltd.

SrTiO3 Single Crystal Substrate

Shin-Etsu SrTiO3 Single Crystal Substrate S-1001 High-purity perovskite oxide substrate with <0.1° miscut, excellent lattice match for epitaxial growth of complex oxides, low defect density, and superior thermal/chemical stability—ideal for RHEED monitoring, thin-film deposition, and quantum material research applications.
  • srtio3 single crystal substrate_7f52057d
  • srtio3 single crystal substrate_7f52057d

Features Of SrTiO3 Single Crystal Substrate

  1. Highly stable perovskite crystal structure with excellent lattice match for epitaxial growth of oxide thin films.

  2. Ultra-low defect density and surface roughness (<0.2 nm RMS) after chemical-mechanical polishing (CMP).

  3. Wide bandgap (~3.2 eV) enabling high dielectric strength and low optical absorption in visible–NIR range.

  4. Excellent thermal stability up to 1300 °C in oxidizing atmospheres without phase decomposition.

  5. Controlled off-cut orientation (e.g., 0.1°–1.0° toward [100] or [110]) for step-flow epitaxy and domain engineering.

Typical Applications Of SrTiO3 Single Crystal Substrate

  1. Heteroepitaxial growth of high-temperature superconductors (e.g., YBCO, LSCO) for quantum devices and SQUIDs.

  2. Platform for complex oxide heterostructures in spintronics, ferroelectric tunnel junctions, and memristive neuromorphic devices.

  3. Substrate for atomic-layer deposition (ALD) and pulsed laser deposition (PLD) of functional oxide thin films (e.g., LaAlO₃, NiO, CoFe₂O₄).

  4. Reference standard in X-ray diffraction (XRD), Raman spectroscopy, and surface science calibration studies.

  5. Base material for tunable microwave dielectrics and high-K gate dielectrics in advanced microelectronics research.

Specifications Of SrTiO3 Single Crystal Substrate



Chemical TypeStrontium Titanate (SrTiO₃), single-crystal perovskite oxide
Product FormPolished wafers (standard diameters: 10 mm, 15 mm, 25 mm; thickness: 0.5 mm ±0.05 mm)
Crystal Orientation(001) surface, ±0.1° miscut tolerance; optional (110) or (111) orientations available
Surface FinishDouble-side polished, epi-ready; Ra < 0.15 nm, no scratches or pits (per SEM/AFM verification)
Melting Point~2080 °C (decomposes before full melting under ambient pressure)
Primary ApplicationsEpitaxial thin-film synthesis, fundamental condensed matter research, device prototyping
Key FeaturesHigh purity (>99.99% trace metals), stoichiometric composition, low twin density, low dislocation density (<1 × 10⁴ cm⁻²)
Regulatory ComplianceRoHS-compliant; no REACH SVHC substances above threshold; certified non-hazardous for transport (UN3077)


Compatible Systems Of SrTiO3 Single Crystal Substrate

Common Compatible SystemsSuitability
Pulsed Laser Deposition (PLD) systems (e.g., Newport, TSST, K.J. Lesker)Highly Recommended – Optimized for oxygen-rich chamber environments and high-temperature substrate heating (≤800 °C)
Molecular Beam Epitaxy (MBE) with oxide effusion cells (e.g., Veeco, Riber)Highly Recommended – Compatible with in-situ RHEED monitoring and ultra-high vacuum (UHV <1×10⁻¹⁰ Torr) conditions
Atomic Layer Deposition (ALD) platforms (e.g., Beneq, Picosun, Oxford Instruments)Recommended – Requires pre-treatment (O₂ plasma or annealing) for optimal nucleation of Al₂O₃, HfO₂, etc.
Scanning Probe Microscopy (SPM) & AFM systemsSuitable – Atomically flat surface enables high-resolution topography and piezoresponse imaging without additional cleaning

SrTiO3 Single Crystal Substrate – Frequently Asked Questions (FAQ)

Q1: What is the CAS Registry Number for SrTiO₃?

A: The CAS Registry Number for strontium titanate is 12060-58-1.


Q2: Is SrTiO₃ subject to leaching or ion migration when used in aqueous or electrochemical environments?

A: SrTiO₃ exhibits negligible dissolution under neutral pH and ambient temperature; however, prolonged exposure to acidic (pH <3) or strongly alkaline (pH >12) solutions may cause slow Sr²⁺ leaching. Not recommended for long-term immersion applications without protective capping layers.


Q3: How does SrTiO₃ compare to MgO or LaAlO₃ substrates for oxide heteroepitaxy?

A: SrTiO₃ offers superior lattice matching for many perovskite oxides (e.g., ~0.1% mismatch with YBCO), higher thermal stability than MgO, and lower interfacial reactivity than LaAlO₃—making it preferred for multilayer oxide stacks requiring atomic precision and interface integrity.


Q4: Does your SrTiO₃ substrate carry any regulatory certifications (e.g., ISO 9001, REACH, RoHS)?

A: All batches are manufactured under ISO 9001-certified quality management systems. Each lot includes a Certificate of Analysis (CoA) confirming RoHS compliance and absence of REACH SVHC substances above 0.1 wt%. Full regulatory documentation is available upon request.



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