Guangzhou Eric Wei Chemical Co., Ltd.
Guangzhou Eric Wei Chemical Co., Ltd.

SrTiO3 Single Crystal Wafer

Shin-Etsu SrTiO3 Single Crystal Wafer SRT-100-500-A high-purity perovskite substrate with <0.1° miscut, 500μm thickness, polished both sides, ideal for oxide thin-film epitaxy, superconducting devices, and quantum material research due to its lattice match, thermal stability, and low defect density.
  • srtio3 single crystal wafer_01427c8b
  • srtio3 single crystal wafer_01427c8b

Features Of SrTiO3 Single Crystal Wafer

  1. High-purity single-crystal structure with low defect density (dislocation density < 1 × 10⁴ cm⁻²).

  2. Excellent dielectric properties, including high relative permittivity (εᵣ ≈ 300 at 1 kHz) and low dielectric loss (tan δ < 0.001).

  3. Atomically flat surface finish (RMS roughness < 0.2 nm) achieved via mechanical polishing and chemical-mechanical planarization (CMP).

  4. Thermally stable up to 1300 °C in oxidizing atmospheres; retains crystallinity without phase decomposition.

  5. Compatible with standard thin-film deposition techniques including sputtering, PLD, and MBE for heteroepitaxial growth.

Typical Applications Of SrTiO3 Single Crystal Wafer

  1. Substrate for epitaxial growth of complex oxide thin films (e.g., LaAlO₃, YBCO, LSMO) in quantum materials research.

  2. Active layer or gate dielectric in oxide-based field-effect transistors (OFETs) and memristive devices.

  3. Platform for scanning probe microscopy (SPM) calibration and nanoscale ferroelectric domain studies.

  4. Template for high-temperature superconducting Josephson junction fabrication.

  5. Reference material in X-ray diffraction (XRD), Raman spectroscopy, and ellipsometry metrology standards.

Specifications Of SrTiO3 Single Crystal Wafer



Chemical TypeStrontium titanate (SrTiO₃), perovskite-structured ceramic
Product FormPolished single-crystal wafer (double-side polished, epi-ready)
Crystal Orientation(001) ± 0.5°, (110) ± 0.5°, or (111) ± 0.5° (customizable)
Diameter & Thickness10–50 mm diameter; 0.5–1.0 mm thickness (standard: 15 mm × 0.5 mm)
Surface FinishBoth sides polished; RMS roughness ≤ 0.2 nm; epi-ready, particle-free
Primary ApplicationsEpitaxial substrate, dielectric platform, quantum device template
Key FeaturesNon-stoichiometric tolerance (Sr/Ti ratio 0.98–1.02), low oxygen vacancy concentration
Regulatory ComplianceRoHS-compliant; no REACH SVHC substances above threshold; SDS available upon request


Compatible Systems Of SrTiO3 Single Crystal Wafer

Common Compatible SystemsSuitability
Pulsed Laser Deposition (PLD) systems (e.g., Newport/Coherent, DCA Instruments)Highly Recommended – Optimal lattice matching and thermal stability during ablation
Molecular Beam Epitaxy (MBE) chambers (e.g., Riber, Veeco)Highly Recommended – Low outgassing rate and ultra-high vacuum compatibility
Sputtering systems (DC/RF magnetron, e.g., Kurt J. Lesker, Angstrom Engineering)Recommended – Stable under plasma exposure; minimal target poisoning risk
Atomic Layer Deposition (ALD) reactors (e.g., Beneq, Oxford Instruments)Suitable – Surface hydroxyl groups enable uniform nucleation; requires pre-anneal for optimal adhesion

SrTiO3 Single Crystal Wafer – Frequently Asked Questions (FAQ)

Q1: What is the CAS Registry Number for SrTiO₃?

A: The CAS Registry Number for strontium titanate (SrTiO₃) is 12060-58-1.


Q2: Is SrTiO₃ wafer suitable for direct contact with food or pharmaceutical products?

A: No — SrTiO₃ wafers are intended for research, semiconductor, and advanced materials applications only; they are not certified for food contact, medical implantation, or pharmaceutical use.


Q3: How does SrTiO₃ compare to MgO or LaAlO₃ as an epitaxial substrate?

A: SrTiO₃ offers superior lattice match for many perovskites (e.g., 0.7% mismatch with YBCO), higher dielectric constant than MgO, and greater thermal/chemical stability than LaAlO₃ under reducing conditions.


Q4: Does SrTiO₃ leach strontium or titanium ions under aqueous or acidic conditions?

A: Bulk SrTiO₃ is highly insoluble in water and mild acids; however, prolonged exposure to strong mineral acids (e.g., >6 M HCl) at elevated temperatures may cause gradual surface dissolution — not recommended for liquid-phase processing without passivation.



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