Wet Electronic Chemicals Electronic Grade Hydrogen Peroxide

Features Of Wet Electronic Chemicals Electronic Grade Hydrogen Peroxide

1. Ultra-low metallic impurities (<10 ppt for Na, K, Ca, Fe, Cu, Ni, Zn, Cr, Al) meeting SEMI C1/C7 standards.

2. Negligible particle count (<1 particle/mL at ≥0.1 μm) verified by laser particle counting per SEMI F39.

3. Controlled organic residue levels (<50 ppb total TOC) ensuring minimal carbon contamination during wafer cleaning.

4. Stabilized formulation with proprietary chelating agents to prevent catalytic decomposition and maintain shelf-life stability.

5. Manufactured and packaged in ISO Class 4 (Class 10) cleanrooms under strict nitrogen-purged, double-bagged HDPE or fluoropolymer-lined containers.

Typical Applications Of Wet Electronic Chemicals Electronic Grade Hydrogen Peroxide

1. SC-1 (Standard Clean-1) solution component for removal of organic residues and native oxide thinning in front-end-of-line (FEOL) silicon wafer processing.

2. Oxidizing agent in copper post-CMP (Chemical Mechanical Polishing) cleaning to remove residual slurry and suppress copper corrosion.

3. Photoresist stripping aid in advanced node (≤28 nm) logic and memory fabrication, particularly for low-k dielectric compatibility.

4. Surface activation and hydrophilization prior to ALD (Atomic Layer Deposition) or CVD (Chemical Vapor Deposition) precursor adsorption.

5. Final rinse additive in high-purity DI water systems to reduce trace metal redeposition on patterned wafers.

Specifications Of Wet Electronic Chemicals Electronic Grade Hydrogen Peroxide

Compatible Systems Of Wet Electronic Chemicals Electronic Grade Hydrogen Peroxide

Wet Electronic Chemicals Electronic Grade Hydrogen Peroxide – Frequently Asked Questions (FAQ)

Q1: What is the CAS Number for Electronic Grade Hydrogen Peroxide?

A: The CAS Number is 7722-84-1. This applies to hydrogen peroxide in all aqueous concentrations; our electronic grade material is identified with lot-specific purity certification.

Q2: How should this product be stored to maintain stability and purity?

A: Store unopened containers upright in a cool (10–25 °C), dry, dark environment under nitrogen blanket. Avoid exposure to stainless steel, copper, or iron surfaces; use only fluoropolymer (PFA, ETFE) or high-density polyethylene (HDPE) contact materials. Shelf life is 12 months from date of manufacture when stored properly.

Q3: Does this product meet SEMI SP1 and SEMI SP2 requirements for metallic contamination?

A: Yes — our electronic grade hydrogen peroxide meets or exceeds SEMI SP1 (for 300 mm wafers) and SEMI SP2 (for 200 mm wafers) specifications for metallic impurities, including rigorous testing for Ag, As, Au, Ba, Be, Bi, Cd, Co, Cs, Ga, Ge, In, Ir, La, Li, Mg, Mn, Mo, Nb, Pd, Pb, Pr, Rb, Re, Sb, Sc, Se, Si, Sm, Sr, Ta, Te, Th, Ti, Tl, U, V, W, Y, Yb, and Zr at sub-ppt detection limits.

Q4: Is there risk of extractables or leachables when used with PFA tubing or quartz components?

A: No significant extractables are observed under typical process conditions (≤60 °C, <5 min dwell time). Independent testing per SEMI F57 confirms <1 ppt total extractable metals and <10 ppb organic leachables (by GC-MS) from certified PFA and high-purity quartz after 72-hour static exposure at 25 °C.